Summary of FS 209E and ISO 14644-1 and ISO 14644-2
The cleanliness classification levels defined by FS209E and ISO 14644-1 are approximately equal, except the new ISO standard uses new class designations, a metric measure of air volume and adds three additional classes - two cleaner than Class 10 and one beyond than Class 100,000. The second new ISO standard, ISO 14644-2, gives requirements for monitoring a clean-room or clean zone to provide evidence of its continued compliance with ISO 14644-1.
The following table compares FED STD 209E to the new ISO 14644-1 classifications.
| ISO 14644-1 | FED STD 209E |
| ISO Class | English | Metric |
| 1 | | |
| 2 | | |
| 3 | 1 | M1.5 |
| 4 | 10 | M2.5 |
| 5 | 100 | M3.5 |
| 6 | 1,000 | M4.5 |
| 7 | 10,000 | M5.5 |
| 8 | 100,000 | M6.5 |
| 9 | | |
The ISO standard also requires fewer sample locations, especially as the clean-room/area size increases; however, the ISO standard does require minimum one minute samples, whereas the Federal Standard allows shorter samples, especially at smaller particle sizes.
For example, to certify an FS Class 10 clean-room (ISO class 4), with 250 square feet (7.08 square meters), classified at 0.3 micron with a 1 cf/m flow rate particle counter, the required number of sample locations, sample volumes, and sample times would be as follows:
FS209E requires 10 sample locations, 19.6 liter minimum sample volume (0.85 cf), and a sample time of 51 seconds. This yields a total minimum sample time of 510 seconds and 10 equipment moves.
ISO 14644-1 requires 3 sample locations, 19.6 liter minimum sample volume (0.85 cf ), but also a minimum sample time of one minute yielding three samples of one cubic foot. This yields a total sample time of 180 seconds and three equipment moves.
The precise count levels required by ISO 14644-1 for each classification, by particle size, are given below.
| Number of Particles per Cubic Meter by Micrometer Size |
| Class | 0.1um | 0.2um | 0.3um | 0.5um | 1um | 5um |
| ISO 1 | 10 | 2 | | | | |
| ISO 2 | 100 | 24 | 10 | 4 | | |
| ISO 3 | 1,000 | 237 | 102 | 35 | 8 | |
| ISO 4 | 10,000 | 2,370 | 1,020 | 352 | 83 | |
| ISO 5 | 100,000 | 23,700 | 10,200 | 3,520 | 832 | 29 |
| ISO 6 | 1,000,000 | 237,000 | 102,000 | 35,200 | 8,320 | 293 |
| ISO 7 | | | | 352,000 | 83,200 | 2,930 |
| ISO 8 | | | | 3,520,000 | 832,000 | 29,300 |
| ISO 9 | | | | 35,200,000 | 8,320,000 | 293,000 |
ISO 14644-2 determines the type and frequency of testing required to conform with the standard. The following tables indicate which tests are mandatory and which tests are optional.
| Schedule of Tests to Demonstrate Continuing Compliance |
| Test Parameter | Class | Maximum Time Interval | Test Procedure |
| Particle Count Test | <= ISO 5 | 6 Months | ISO 14644-1 Annex A |
| >ISO 5 | 12 Months |
| Air Pressure Difference | All Classes | 12 Months | ISO 14644-1 Annex B5 |
| Airflow | All Classes | 12 Months | ISO 14644-1 Annex B4 |
| Schedule of Additional Optional Tests |
| Test Parameter | Class | Maximum Time Interval | Test Procedure |
| Installed Filter Leakage | All Classes | 24 Months | ISO 14644-3 Annex B6 |
| Containment Leakage | All Classes | 24 Months | ISO 14644-3 Annex B4 |
| Recovery | All Classes | 24 Months | ISO 14644-3 Annex B13 |
| Airflow Visualization | All Classes | 24 Months | ISO 14644-3 Annex B7 |
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